Target Gas | Range (ppm) |
TLV-TWA (ACGIH) |
Remarks | ||||
Name | Chemical Formula | System No. | |||||
Low | Standard | High | (ppm) | ||||
Chlorine | Cl2 | 100 | 0.3 | 1.5 | 10 | 0.5 | |
Hydrogen Sulfide | H2S | 200 | 0.3 | 30 | 200 | 1 | |
Hydrogen Cyanide | HCN | 300 | 3 | 15 | 100 | C 4.7 | |
Hydrogen Chloride | HCl | 400 | 6 | 15 | C 2 | ||
Sulfur Dioxide | SO2 | 500 | 6 | 15 | 0.25 (STEL) | ||
Hydrogen Fluoride | HF | 700 | 9 | 0.5 | |||
Ozone | O3 | 800 | 0.3 | 1 | 3 | 0.1 | |
Bromine/Iodine | Br2/I2 | 900 | 0.3 | 3 | 10 | Br20.1ppm, I2 0.01ppm |
|
Oxygen | O2 | 1100 | 5% | 25% | 50% | - | |
Carbon Monoxide | CO | 1200 | 50 | 75 | 1000 | 25 | |
Fluorine | F2 | 1400 | 1 | 3 | 10 | 1 | |
Chlorine Trifluoride | ClF3 | 1400 | 0.3 | C 0.1 | |||
Hydrogen | H2 | 1500 | 1000 | 4000 | 4% | - | |
Acetic Acid | CH3COOH | 1600 | 30 | 10 | |||
Nitrogen Dioxide | NO2 | 1700 | 9 | 3 | |||
Nitric Oxide | NO | 1700 | 100 | 25 | |||
Methanol | CH3OH | 2100 | 600 | 200 | |||
Ethanol | C2H5OH | 2100 | 1000 | 1000(STEL) | |||
Isopropyl Alcohol | CH3CH(OH)CH3 | 2100 | 600 | 1000 | 200 | ||
2% | NDIR Sensor | ||||||
Ethylene Oxide | C2H4O | 2200 | 150 | 1 | |||
Combustible Gas | CH4 etc. | 2300 | 100%LEL | - | |||
Ammonia | NH3 | 2400 | 75 | 200 | 25 | ||
Dimethyl Amine | (CH3)2NH | 2400 | 30 | 5 | |||
Hydrazine | N2H4 | 2500 | 1 | 0.01 | |||
TDMAT | Ti[(CH3)2N]4 | 2500 | 1 | - | |||
TEOS | Si(C2H5O)4 | 3000 | 30 | 10 | |||
Gen. Acid. | - | 3100 | - depends on Gas - | - | |||
Hydrogen Selenide | H2Se | 3200 | 0.2 | 1 | 0.05 | ||
H.C./VOC | - | 3300 | - depends on Gas - | - | |||
Chloride | - | 3400 | - depends on Gas - | - | |||
Fluoride | - | 3700 | - depends on Gas - | - | |||
Hydride | - | 4000 | - depends on Gas - | - | for Dry Scrubber | ||
Nitrogen Trifluoride | NF3 | 4100 | 30 | 10 | |||
Chlorinated Hydrocarbons | - | 4300 | - depends on Gas - | - | |||
Methyl Bromide/Methyl Iodide | CH3Br/CH3I | 4400 | 50 | 150 | CH3Br 1ppm, CH3I 2ppm | ||
Sulfur Hexafluoride | SF6 | 4500 | 200 | 1500 | 1000 | ||
300 | 5000 | NDIR Sensor | |||||
Nitrous Oxide | N2O | 4600 | 300 | 50 | NDIR Sensor | ||
CFCs | - | 4700 | - depends on Gas - | - | |||
Tetrafluoromethane | CF4 | 4700 | 500 | 5000 | - | NDIR Sensor | |
Acrylonitrile | CH2=CHCN | 4900 | 60 | 2 | |||
Silane | SiH4 | 5000 | 1 | 15 | 5 | ||
Phosphine | PH3 | 5000 | 1 | 0.3 | |||
Arsine | AsH3 | 5000 | 0.2 | 0.005 | |||
Germane | GeH4 | 5000 | 0.6 | 0.2 | |||
Trimethyl Silane | (CH3)3SiH | 5000 | 15 | - | |||
Monomethyl Silane | CH3SiH3 | 5000 | 15 | - | |||
H.C. | - | 5300 | - depends on Gas - | - | Heated Semiconductor sensor |