| Target Gas | Range (ppm) |
TLV-TWA (ACGIH) |
Remarks | ||||
| Name | Chemical Formula | System No. | |||||
| Low | Standard | High | (ppm) | ||||
| Chlorine | Cl2 | 100 | 0.3 | 1.5 | 10 | 0.5 | |
| Hydrogen Sulfide | H2S | 200 | 0.3 | 30 | 200 | 1 | |
| Hydrogen Cyanide | HCN | 300 | 3 | 15 | 100 | C 4.7 | |
| Hydrogen Chloride | HCl | 400 | 6 | 15 | C 2 | ||
| Sulfur Dioxide | SO2 | 500 | 6 | 15 | 0.25 (STEL) | ||
| Hydrogen Fluoride | HF | 700 | 9 | 0.5 | |||
| Ozone | O3 | 800 | 0.3 | 1 | 3 | 0.1 | |
| Bromine/Iodine | Br2/I2 | 900 | 0.3 | 3 | 10 | Br20.1ppm, I2 0.01ppm |
|
| Oxygen | O2 | 1100 | 5% | 25% | 50% | - | |
| Carbon Monoxide | CO | 1200 | 50 | 75 | 1000 | 25 | |
| Fluorine | F2 | 1400 | 1 | 3 | 10 | 1 | |
| Chlorine Trifluoride | ClF3 | 1400 | 0.3 | C 0.1 | |||
| Hydrogen | H2 | 1500 | 1000 | 4000 | 4% | - | |
| Acetic Acid | CH3COOH | 1600 | 30 | 10 | |||
| Nitrogen Dioxide | NO2 | 1700 | 9 | 3 | |||
| Nitric Oxide | NO | 1700 | 100 | 25 | |||
| Methanol | CH3OH | 2100 | 600 | 200 | |||
| Ethanol | C2H5OH | 2100 | 1000 | 1000(STEL) | |||
| Isopropyl Alcohol | CH3CH(OH)CH3 | 2100 | 600 | 1000 | 200 | ||
| 2% | NDIR Sensor | ||||||
| Ethylene Oxide | C2H4O | 2200 | 150 | 1 | |||
| Combustible Gas | CH4 etc. | 2300 | 100%LEL | - | |||
| Ammonia | NH3 | 2400 | 75 | 200 | 25 | ||
| Dimethyl Amine | (CH3)2NH | 2400 | 30 | 5 | |||
| Hydrazine | N2H4 | 2500 | 1 | 0.01 | |||
| TDMAT | Ti[(CH3)2N]4 | 2500 | 1 | - | |||
| TEOS | Si(C2H5O)4 | 3000 | 30 | 10 | |||
| Gen. Acid. | - | 3100 | - depends on Gas - | - | |||
| Hydrogen Selenide | H2Se | 3200 | 0.2 | 1 | 0.05 | ||
| H.C./VOC | - | 3300 | - depends on Gas - | - | |||
| Chloride | - | 3400 | - depends on Gas - | - | |||
| Fluoride | - | 3700 | - depends on Gas - | - | |||
| Hydride | - | 4000 | - depends on Gas - | - | for Dry Scrubber | ||
| Nitrogen Trifluoride | NF3 | 4100 | 30 | 10 | |||
| Chlorinated Hydrocarbons | - | 4300 | - depends on Gas - | - | |||
| Methyl Bromide/Methyl Iodide | CH3Br/CH3I | 4400 | 50 | 150 | CH3Br 1ppm, CH3I 2ppm | ||
| Sulfur Hexafluoride | SF6 | 4500 | 200 | 1500 | 1000 | ||
| 300 | 5000 | NDIR Sensor | |||||
| Nitrous Oxide | N2O | 4600 | 300 | 50 | NDIR Sensor | ||
| CFCs | - | 4700 | - depends on Gas - | - | |||
| Tetrafluoromethane | CF4 | 4700 | 500 | 5000 | - | NDIR Sensor | |
| Acrylonitrile | CH2=CHCN | 4900 | 60 | 2 | |||
| Silane | SiH4 | 5000 | 1 | 15 | 5 | ||
| Phosphine | PH3 | 5000 | 1 | 0.3 | |||
| Arsine | AsH3 | 5000 | 0.2 | 0.005 | |||
| Germane | GeH4 | 5000 | 0.6 | 0.2 | |||
| Trimethyl Silane | (CH3)3SiH | 5000 | 15 | - | |||
| Monomethyl Silane | CH3SiH3 | 5000 | 15 | - | |||
| H.C. | - | 5300 | - depends on Gas - | - | Heated Semiconductor sensor | ||
